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MoS<sub>2</sub>oxidative etching caught in the act: formation of single (MoO<sub>3</sub>)<sub><i>n</i></sub>molecules

Saeed Sovizi, Sergio Tosoni, Robert Szoszkiewicz

2022Nanoscale Advances15 citationsDOIOpen Access PDF

Abstract

We report the presence of sub-nm MoO x clusters formed on basal planes of the 2H MoS 2 crystals during thermal oxidative etching in air at a temperature of 370 °C.

Topics & Concepts

StoichiometryEtching (microfabrication)Raman spectroscopyMoleculeSpectroscopyChemistryDensity functional theoryAtomic force microscopyCrystallographyAnalytical Chemistry (journal)Materials scienceNanotechnologyPhysical chemistryComputational chemistryOpticsOrganic chemistryChromatographyLayer (electronics)PhysicsQuantum mechanics2D Materials and ApplicationsMXene and MAX Phase MaterialsMetal and Thin Film Mechanics
MoS<sub>2</sub>oxidative etching caught in the act: formation of single (MoO<sub>3</sub>)<sub><i>n</i></sub>molecules | Litcius