An intensive approach to optimize capacitive type RF MEMS shunt switch
P. Ashok Kumar, K. Srinivasa Rao, K. Girija Sravani, B. Balaji, M. Aditya, Koushik Guha, Ameen El-Sinawi
Topics & Concepts
Capacitive sensingMicroelectromechanical systemsRadio frequencyCapacitanceElectronic engineeringVoltageMultiphysicsExtremely high frequencyInsertion lossMaterials scienceTransmission lineElectrical engineeringEngineeringOptoelectronicsFinite element methodPhysicsTelecommunicationsElectrodeStructural engineeringQuantum mechanicsMicrowave Engineering and WaveguidesAdvanced MEMS and NEMS TechnologiesPhotonic and Optical Devices