The influence of thermal stability on the properties of Cu3N layers synthesized by pulsed magnetron sputtering method
Sebastian Okrasa, Magdalena Wilczopolska, Grzegorz W. Strzelecki, Katarzyna Nowakowska‐Langier, Rafał Choduń, R. Minikayev, K. Król, Łukasz Skowroński, Kamil Namyślak, Bartosz Wicher, A. Wiraszka, Krzysztof Zdunek
Topics & Concepts
Raman spectroscopyAnalytical Chemistry (journal)Materials scienceNitrideLattice constantStoichiometryThermal stabilityCopperCrystalliteSputter depositionSputteringAnnealing (glass)EllipsometryAtmospheric temperature rangeThin filmMineralogyChemistryDiffractionMetallurgyComposite materialNanotechnologyThermodynamicsPhysical chemistryOpticsLayer (electronics)ChromatographyOrganic chemistryPhysicsZnO doping and propertiesSemiconductor materials and devicesCopper-based nanomaterials and applications