Vapor-phase grafting of a model aminosilane compound to Al2O3, ZnO, and TiO2 surfaces prepared by atomic layer deposition
Vepa Rozyyev, Julia G. Murphy, Edward Barry, Anil U. Mane, S. J. Sibener, Jeffrey W. Elam
Topics & Concepts
SilanizationQuartz crystal microbalanceAtomic layer depositionSurface modificationX-ray photoelectron spectroscopySilaneFourier transform infrared spectroscopyTriethoxysilaneChemical engineeringChemistryInorganic chemistryMaterials scienceAnalytical Chemistry (journal)Layer (electronics)Organic chemistryPhysical chemistryAdsorptionEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesDiamond and Carbon-based Materials Research