Effect of abrasive particle shape on the development of silicon substrate during nano-grinding
Yuhua Huang, Miaocao Wang, Jinming Li, Fulong Zhu
Topics & Concepts
GrindingAbrasiveMaterials scienceNano-OctahedronSiliconParticle (ecology)Substrate (aquarium)DiamondSurface roughnessAtom (system on chip)Surface finishParticle sizeNanotechnologyMetallurgyComposite materialCrystallographyChemical engineeringCrystal structureChemistryComputer scienceOceanographyEngineeringEmbedded systemGeologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications