Effect of oxygen annealing temperature on properties of spatial atomic layer deposited aluminum-doped zinc oxide films
Chia‐Hsun Hsu, Peng Geng, Wan-Yu Wu, Ming-Jie Zhao, Pao-Hsun Huang, Xiaoying Zhang, Zhan-Bo Su, Zirong Chen, Shui‐Yang Lien
Topics & Concepts
Annealing (glass)Materials scienceOxygenDopingElectrical resistivity and conductivityAluminiumZincOxideBand gapThin filmAtmospheric temperature rangeAnalytical Chemistry (journal)Chemical engineeringMetallurgyNanotechnologyOptoelectronicsChemistryMeteorologyPhysicsChromatographyElectrical engineeringEngineeringOrganic chemistryZnO doping and propertiesSemiconductor materials and devicesGas Sensing Nanomaterials and Sensors