Multiscale Modeling in Chemical Vapor Deposition Processes: Models and Methodologies
Nikolaos Cheimarios, George Kokkoris, Andreas G. Boudouvis
Topics & Concepts
Chemical vapor depositionDeposition (geology)Multiscale modelingSurface roughnessProcess (computing)Surface finishMaterials scienceScale (ratio)ComputationThin filmProcess modelingComputer scienceNanotechnologyProcess engineeringProcess optimizationChemical engineeringChemistryPhysicsComposite materialAlgorithmEngineeringGeologySedimentPaleontologyQuantum mechanicsOperating systemComputational chemistryFluid Dynamics and Thin FilmsSurface Modification and SuperhydrophobicityNanofabrication and Lithography Techniques