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Effective charge dynamics in Al2O3/SiO2 multilayer stacks and their influence on silicon surface passivation

Hemangi Patel, Christian Reichel, Armin Richter, Paul Masuch, Jan Benick, Stefan W. Glunz

2021Applied Surface Science12 citationsDOI

Topics & Concepts

PassivationMaterials scienceAtomic layer depositionLayer (electronics)Field effectAnalytical Chemistry (journal)Electric fieldOptoelectronicsSiliconVoltageCharge densityNanotechnologyChemistryElectrical engineeringPhysicsChromatographyQuantum mechanicsEngineeringSemiconductor materials and devicesSilicon and Solar Cell TechnologiesSemiconductor materials and interfaces
Effective charge dynamics in Al2O3/SiO2 multilayer stacks and their influence on silicon surface passivation | Litcius