Thermal effects on removal mechanism of monocrystal SiC during micro-laser assisted nanogrinding process
Binbin Meng, Chen Li
Topics & Concepts
Materials scienceBrittlenessMonocrystalline siliconLaserMachinabilityIrradiationThermalComposite materialSilicon carbideProcess (computing)Mechanism (biology)OpticsOptoelectronicsSiliconMetallurgyMachiningComputer scienceNuclear physicsOperating systemPhilosophyEpistemologyPhysicsMeteorologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization