Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors
Ying Wang, Weiguang Tong, N. Han
Topics & Concepts
Materials scienceSputteringNon-blocking I/OMicroelectromechanical systemsWaferAnnealing (glass)FabricationOptoelectronicsThin filmSchottky barrierNanotechnologyThermal stabilityChemical engineeringCatalysisComposite materialEngineeringBiochemistryChemistryAlternative medicineMedicineDiodePathologyGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsTransition Metal Oxide Nanomaterials