Focused ion beam milling based formation of nanochannels in silicon-glass microfluidic chips for the study of ion transport
D. V. Lebedev, Grigory Malyshev, Ilya I. Ryzhkov, А М Можаров, K Yu Shugurov, V. A. Sharov, Maxim S. Panov, Ilya I. Tumkin, P K Afonicheva, A. A. Evstrapov, Anton Bukatin, Ivan S. Mukhin
Topics & Concepts
Materials scienceFabricationNanotechnologyMicrofluidicsNanofluidicsSiliconWaferFocused ion beamIon milling machineEtching (microfabrication)NanolithographyAnodic bondingIonElectron-beam lithographyIon beamOptoelectronicsResistChemistryLayer (electronics)MedicinePathologyAlternative medicineOrganic chemistryNanopore and Nanochannel Transport StudiesMicrofluidic and Capillary Electrophoresis ApplicationsIon-surface interactions and analysis