Ultra-high-resolution nondestructive photolithography of quantum dots enabled by photo-shield crosslinker
Chang Gu, Zhixin Zhai, Wenxuan Wang, Hao Tan, Shuo Ding, Junpeng Fan, Lei Qian, Ting Zhang, Chaoyu Xiang
Topics & Concepts
PhotolithographyQuantum dotMaterials scienceOptoelectronicsNanotechnologyShieldHigh resolutionGeologyRemote sensingPetrologyNear-Field Optical MicroscopyQuantum Dots Synthesis And PropertiesAdvanced Semiconductor Detectors and Materials