Demonstration of High-Performance 4H-SiC MISIM Ultraviolet Photodetector With Operation Temperature of 550 °C and High Responsivity
Fengyu Du, Qingwen Song, Xiao-Yan Tang, Zeyulin Zhang, Hao Yuan, Chao Han, Chunfu Zhang, Yimen Zhang, Yuming Zhang
Abstract
In this article, a 4H-SiC metal-insulator-semiconductor-insulator-metal (MISIM) ultraviolet (UV) photodetector (PD) with a normal working temperature up to 550 °C, has been successfully fabricated and characterized for the first time. At 550 °C, the dark current of our fabricated MISIM remains at ~0.2 nA level and a record photo-to-dark current ratio (PDCR) of 62.7 is achieved at a reverse bias voltage of −15 V. Under 275 nm illumination, high responsivity (R) of 0.23 and 0.54 A/W have been achieved at room temperature (RT) and 550 °C, respectively. To the best of our knowledge, this is the best result reported for high-temperature UV detectors based on the 4H-SiC. This work is significant for developing high-temperature 4H-SiC-based UV PDs.