Electron-beam lithography of cinnamate polythiophene films: conductive nanorods for electronic applications
N. Maximilian Bojanowski, Christian Huck, Lisa Veith, Karl‐Philipp Strunk, Rainer Bäuerle, Christian Melzer, Jan Freudenberg, Irene Wacker, Rasmus R. Schröder, Petra Tegeder, Uwe H. F. Bunz
Abstract
excited state [2+2]-cycloaddition. Network formation in thin films is evidenced by infrared spectroscopy and film retention experiments. For the polymer studied herin, the electron-stimulated process appears to be superior to photo (UV)-induced crosslinking as it leads to less degradation. Electron beam lithography (EBL) patterns cinnamate-substituted polythiophene thin films on the nanoscale with a resolution of around 100 nm. As a proof of concept, we fabricated nanoscale organic transistors using doped and cross-linked P3ZT as contact fingers in thin film transistors.