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Growth of AZO/Cu/AZO multilayer structures by confocal RF magnetron sputtering and their microstructural and optoelectronic properties before and after annealing

Djelloul Mendil, Fatiha Challali, Tahar Touam, Salim Ouhenia, Mokhtar Boudaa, Abdelhafid Souici, D. Djouadi, A. Chelouche

2022Materials Science and Engineering B15 citationsDOI

Topics & Concepts

Materials scienceSputter depositionAnnealing (glass)OptoelectronicsSputteringConfocalOpticsThin filmComposite materialNanotechnologyPhysicsZnO doping and propertiesGas Sensing Nanomaterials and SensorsGa2O3 and related materials
Growth of AZO/Cu/AZO multilayer structures by confocal RF magnetron sputtering and their microstructural and optoelectronic properties before and after annealing | Litcius