Influence mechanism of defects on the subsurface damage and structural evolution of diamond in CMP process
Song Yuan, Xiaoguang Guo, Shuohua Zhang, Chaoyue Zhang, Penghui Li, Zhuji Jin, Renke Kang, Dongming Guo
Topics & Concepts
Materials scienceMachiningPolishingAmorphous solidDiamondMolecular dynamicsSurface integrityEnhanced Data Rates for GSM EvolutionNanotechnologyComposite materialMetallurgyCrystallographyChemistryComputer scienceComputational chemistryTelecommunicationsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesMetal and Thin Film Mechanics