Thermal design aspects for improving temperature homogeneity of silicon wafer during thermal processing in microlithography
M. Muneeshwaran, Chi‐Chuan Wang
Topics & Concepts
Homogeneity (statistics)WaferThermalMaterials scienceMechanical engineeringTemperature controlLithographyFunnelSiliconEngineeringOptoelectronicsComputer scienceMeteorologyPhysicsMachine learningAdvancements in Photolithography Techniques3D IC and TSV technologiesAdvanced Surface Polishing Techniques