The optical emission spectroscopy of nitrogen plasma driven by the 94.92 MHz/13.56 MHz dual-frequency
Qianghua Yuan, Pei Ren, Shanshan Liu, Jingjing Wang, Guiqin Yin
Topics & Concepts
ExcitationAtomic physicsRotational temperatureAnalytical Chemistry (journal)Excitation temperatureSpectroscopyVibrational temperaturePlasmaEmission spectrumMaterials scienceNuclear magnetic resonancePhysicsChemistrySpectral lineExcited stateAstronomyChromatographyQuantum mechanicsPlasma Diagnostics and ApplicationsPlasma Applications and DiagnosticsLaser-induced spectroscopy and plasma