Nanomechanical properties and thermal stability of Al–N-co-doped DLC films prepared by filtered cathodic vacuum arc deposition
Pornwasa Wongpanya, Praphaphon Silawong, Pat Photongkam
Topics & Concepts
Materials scienceThermal stabilityX-ray photoelectron spectroscopyCathodic arc depositionVacuum arcDiamond-like carbonDopingAnalytical Chemistry (journal)CoatingAnnealing (glass)Composite materialThin filmChemical engineeringNanotechnologyCathodic protectionPlasmaElectrochemistryOptoelectronicsEngineeringPhysical chemistryElectrodeQuantum mechanicsChemistryChromatographyPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites