Characterization and wear role of (CrAlVTiNb)Nx high-entropy alloy nitride films deposited by high power impulse magnetron sputtering
Xiaoqing Lu, Xiao Zhang, Yan Lu, Cong Wang, Junying Hao, Weimin Liu, Weimin Liu
Topics & Concepts
High-power impulse magnetron sputteringAlloySputter depositionNitrideMaterials scienceHigh entropy alloysMetallurgySputteringCharacterization (materials science)Impulse (physics)Thin filmComposite materialNanotechnologyPhysicsQuantum mechanicsLayer (electronics)Metal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research