Wafer-scale MoS<sub>2</sub> with water-vapor assisted showerhead MOCVD
Michał Macha, Hyun Goo Ji, Mukesh Tripathi, Yanfei Zhao, Mukeshchand Thakur, Jing Zhang, András Kis, Aleksandra Rađenović
Abstract
We adapted the most efficient monolayer growth methodologies from tube-furnace systems to the showerhead geometries. A combination of gas-phase precursors, pre-seeding substrate coating and H 2 O vapor added during growth yields 4-inch monolayer MoS 2 .
Topics & Concepts
MonolayerMaterials scienceChemical vapor depositionWaferScanning electron microscopePhotoluminescenceSapphireEpitaxyRaman spectroscopyX-ray photoelectron spectroscopyOptoelectronicsNanotechnologyChemical engineeringOpticsComposite materialLaserLayer (electronics)PhysicsEngineering2D Materials and ApplicationsMXene and MAX Phase MaterialsNanowire Synthesis and Applications