Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures
Changlin Liu, Xiao Chen, Jinyang Ke, Zhongdi She, Jianguo Zhang, Junfeng Xiao, Jianfeng Xu
Topics & Concepts
Materials scienceRecrystallization (geology)LubricantSiliconMachiningAmorphous solidComposite materialCrystal (programming language)Amorphous siliconSingle crystalMetallurgyCrystalline siliconCrystallographyPaleontologyBiologyProgramming languageChemistryComputer scienceAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization