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Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition

Jiachuan You, Lei Zhao, Hongwei Diao, Wenjing Wang

2021Journal of Materials Science Materials in Electronics10 citationsDOI

Topics & Concepts

Nanocrystalline materialMaterials scienceAmorphous solidPlasma-enhanced chemical vapor depositionNanocrystalline siliconChemical vapor depositionCrystallinityChemical engineeringAnalytical Chemistry (journal)OxideAmorphous siliconLayer (electronics)NanotechnologyCrystalline siliconComposite materialMetallurgyCrystallographyChemistryOrganic chemistryEngineeringThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceZnO doping and properties
Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition | Litcius