Formation of YOF on Y2O3 through surface modification with NH4F and its plasma-resistance behavior
Hwan-Yoon Jang, Kati Raju, Hyun-Kwuon Lee
Topics & Concepts
Materials scienceSurface modificationPlasmaResistance (ecology)Composite materialChemical engineeringEngineeringNuclear physicsPhysicsEcologyBiologyPlasma Diagnostics and ApplicationsMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research