Litcius/Paper detail

Blunting and wear of AFM tips during dynamic lithography

Yang He, Liangchi Zhang, Jipeng Cui, Jiahao Hu

2023Wear17 citationsDOI

Topics & Concepts

Materials scienceLithographyMachinabilityComposite materialStress (linguistics)RADIUSNanotechnologyFabricationMachiningOptoelectronicsMetallurgyComputer securityAlternative medicinePhilosophyComputer scienceLinguisticsMedicinePathologyForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing TechniquesNanofabrication and Lithography Techniques