Thermal activation of hydrogen for defect passivation in poly-Si based passivating contacts
Jana‐Isabelle Polzin, Benjamin Hammann, Tim Niewelt, Wolfram Kwapil, Martin Hermle, Frank Feldmann
Topics & Concepts
PassivationMaterials scienceThermal stabilityAnnealing (glass)HydrogenLayer (electronics)DopingDiffusionSiliconChemical engineeringThermalOptoelectronicsNanotechnologyComposite materialChemistryMeteorologyEngineeringPhysicsThermodynamicsOrganic chemistrySilicon and Solar Cell TechnologiesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and interfaces