Comparison of SiCxNy barriers using different deposition precursors capped on porous low-dielectric-constant SiOCH dielectric film
Yi-Lung Cheng, Yu-Lu Lin
Topics & Concepts
DielectricMaterials sciencePorosityCapacitanceStack (abstract data type)High-κ dielectricLow-k dielectricDeposition (geology)SiliconLayer (electronics)Composite materialOptoelectronicsChemistryElectrodeComputer scienceProgramming languagePaleontologyBiologyPhysical chemistrySedimentCopper Interconnects and ReliabilitySemiconductor materials and devicesMetal and Thin Film Mechanics