Energy band offsets of BeO dielectrics grown via atomic-layer deposition on β-Ga2O3 substrates
Dohwan Jung, Yoonseo Jang, Prakash R. Sultane, Christopher W. Bielawski, Jungwoo Oh
Topics & Concepts
Beryllium oxideAtomic layer depositionBand gapMaterials scienceDielectricHigh-κ dielectricBand offsetOptoelectronicsGate dielectricAnalytical Chemistry (journal)Leakage (economics)Thin filmBerylliumChemistryNanotechnologyElectrical engineeringTransistorValence bandOrganic chemistryChromatographyMacroeconomicsEngineeringVoltageEconomicsGa2O3 and related materialsSemiconductor materials and devicesElectronic and Structural Properties of Oxides