Growth characteristics and film properties of plasma-enhanced and thermal atomic-layer-deposited magnesium oxide thin films prepared using bis(ethylcyclopentadienyl)magnesium precursor
Wangu Kang, Byung Joon Choi, Jeong Hwan Han
Topics & Concepts
Atomic layer depositionMaterials scienceThin filmDielectricMagnesiumHigh-κ dielectricStoichiometryOxideAnalytical Chemistry (journal)Chemical engineeringNanotechnologyOptoelectronicsMetallurgyPhysical chemistryEngineeringChemistryChromatographySemiconductor materials and devicesMagnesium Oxide Properties and ApplicationsCopper Interconnects and Reliability