Enhancing temperature stability of ALD-deposited IGZO thin-film transistor by optimizing composition ratio
Jianting Wu, Huajian Zheng, Min Guo, Yi‐Fu Huang, Xiaoci Liang, Qian Wu, Chuan Liu, Chuan Liu
Topics & Concepts
Materials scienceThin-film transistorComposition (language)TransistorThin filmThermal stabilityAtomic layer depositionNanotechnologyOptoelectronicsChemical engineeringEngineering physicsElectrical engineeringPhysicsEngineeringPhilosophyLinguisticsVoltageLayer (electronics)Thin-Film Transistor TechnologiesSilicon and Solar Cell TechnologiesElectrical and Thermal Properties of Materials