Spectroscopic ellipsometry and FTIR characterization of annealed SiOxNy:H films prepared by PECVD
Mohammed Boulesbaa
Topics & Concepts
Fourier transform infrared spectroscopyPlasma-enhanced chemical vapor depositionAnalytical Chemistry (journal)EllipsometryMaterials scienceAmorphous solidAnnealing (glass)Silicon oxynitrideInfraredThin filmRefractive indexSiliconInfrared spectroscopyChemistrySilicon nitrideCrystallographyOpticsNanotechnologyOptoelectronicsOrganic chemistryComposite materialPhysicsThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceZnO doping and properties