Study of Warpage Evolution and Control for Six-Side Molded WLCSP in Different Packaging Processes
Fei Qin, Shuai Zhao, Yanwei Dai, Mengke Yang, Min Xiang, Daquan Yu
Abstract
A six-side molded wafer-level chip scale package (mWLCSP) is a novel and attractive packaging method for smart phone applications due to its lower cost, better electrical performance, and higher long-term reliability. Nevertheless, wafer warpage in different manufacturing processes is a significant issue for the six-side mWLCSP. This article focuses on wafer warpage evolution in different packaging processes and the development of control method for the six-side mWLCSP. A quarter wafer-level finite-element (FE) model and a strip-level FE model were established to simulate the actual packaging processes by element birth and death method and restart technology. Both the FE models were proved quite efficient and accurate for warpage prediction compared to the experimental results. The effects of geometric parameters and material parameters on the maximum warpage value were studied based on the two established FE warpage models, and some recommendations were given for warpage optimization. Based on the above studies, an improved manufacturing process flow for the six-side mWLCSP was presented and proved feasible to control the maximum warpage value under 3 mm. It offers an insight work for the development and warpage control of the six-side mWLCSP and other wafer-level molded packages.