Adaptive virtual metrology method based on Just-in-time reference and particle filter for semiconductor manufacturing
Haoshu Cai, Jianshe Feng, Feng Zhu, Qibo Yang, Xiang Li, Jay Lee
Topics & Concepts
Process (computing)Computer scienceMetrologySemiconductor device fabricationFuse (electrical)Filter (signal processing)Chemical-mechanical planarizationParticle filterWaferData miningEngineeringMechanical engineeringMathematicsComputer visionElectrical engineeringPolishingOperating systemStatisticsAdvanced Surface Polishing TechniquesAdvanced Measurement and Metrology TechniquesAdvanced machining processes and optimization