Fabrication of carbon nanotube field-effect transistors in commercial silicon manufacturing facilities
Mindy D. Bishop, Gage Hills, Tathagata Srimani, C.L. Lau, Denis Murphy, Samuel H. Fuller, Jefford Humes, Anthony Ratkovich, Mark Nelson, Max M. Shulaker
Topics & Concepts
WaferMaterials scienceFabricationSiliconNanotechnologyCarbon nanotubeTransistorSemiconductor device fabricationField-effect transistorOptoelectronicsElectrical engineeringEngineeringVoltageAlternative medicinePathologyMedicineCarbon Nanotubes in CompositesGraphene research and applicationsNanowire Synthesis and Applications