Pressure-fed mechanism to compensate for motions and dynamic characteristics of compliant nanopositioning stages
Heebum Chun, JaeMin Han, Lesley M. Wright, Alaa Elwany, Herminso Villarraga-Gómez, ChaBum Lee
Topics & Concepts
FluidicsMechanism (biology)ActuatorNatural frequencyStiffnessSpring (device)Materials scienceControl theory (sociology)Pressure sensorAcousticsEngineeringMechanical engineeringStructural engineeringVibrationComputer sciencePhysicsAerospace engineeringElectrical engineeringControl (management)Artificial intelligenceQuantum mechanicsPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsSoft Robotics and Applications