Characterization of flexible low-dielectric constant carbon-doped oxide (SiCOH) thin films under repeated mechanical bending stress
W. Wirth, Jacob G. Comeaux, Seonhee Jang
Topics & Concepts
Materials scienceDielectricComposite materialSuboxideChemical vapor depositionPlasma-enhanced chemical vapor depositionAnalytical Chemistry (journal)OxideNanotechnologyOrganic chemistryChemistryOptoelectronicsMetallurgySemiconductor materials and devicesCopper Interconnects and ReliabilityThin-Film Transistor Technologies