Fs-laser based hybrid micromachining for polymer micro-opto electrical systems
Gian‐Luca Roth, Julian Haubner, Stefan Kefer, Cemal Esen, Ralf Hellmann
Topics & Concepts
Materials scienceSurface micromachiningLaserMicroheaterOptoelectronicsLaser ablationFemtosecondFabricationPolymerMicroelectromechanical systemsNanotechnologyOpticsComposite materialMedicinePhysicsAlternative medicinePathologyLaser Material Processing TechniquesSemiconductor Lasers and Optical DevicesAnalytical Chemistry and Sensors