Precision straightness and displacement measurement based on phase-modulated interferometric scheme with different modulation depths
Yingtian Lou, Shengfan Wang, Liping Yan, Tao Yang, Benyong Chen
Topics & Concepts
InterferometryDisplacement (psychology)Phase modulationModulation (music)OpticsPhase (matter)GeodesyPhysicsMaterials scienceGeologyAcousticsPhase noisePsychologyQuantum mechanicsPsychotherapistAdvanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced machining processes and optimization