Development and characterization of a novel RE3+ doped Core-shell CeO2 abrasive system and its glass CMP investigations
Zichao Li, Liangmao Jin, Zhiqiang Cao, Chong Zhang, Xin Cao, Gaorong Han, Shou Peng, Yong Liu
Topics & Concepts
Materials scienceAbrasivePolishingChemical-mechanical planarizationDopingComposite materialCore (optical fiber)NanotechnologyOptoelectronicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites