Nano-grinding process of single-crystal silicon using molecular dynamics simulation: Nano-grinding parameters effect
Pengyue Zhao, Bo Zhao, Jiansheng Pan, Jianwei Wu
Topics & Concepts
GrindingMaterials scienceNano-WaferResidual stressMolecular dynamicsMachiningSurface integritySiliconCrystal (programming language)NanotechnologyMetallurgyComposite materialComputer scienceProgramming languageComputational chemistryChemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques