Capacitance response of concave well substrate touch-mode capacitive pressure sensor: Mathematical analysis and simulation
Myong-Chol Kang, Chan Ri, JongHuan Choe
Topics & Concepts
LinearityCapacitive sensingCapacitanceMATLABSensitivity (control systems)Deflection (physics)Electronic engineeringMaterials scienceResponse timeElectrodeAcousticsEngineeringComputer scienceElectrical engineeringOpticsPhysicsPhysical chemistryComputer graphics (images)Operating systemChemistryAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting MaterialsMechanical and Optical Resonators