Optimization of corner compensations in wet etching of silicon for a MEMS Z-axis accelerometer
S. Kalaiselvi, L. Sujatha, R. Sundar
Topics & Concepts
UndercutMicroelectromechanical systemsWaferEtching (microfabrication)Materials scienceFabricationDry etchingPlanarSiliconIsotropic etchingSurface micromachiningBulk micromachiningSubstrate (aquarium)OptoelectronicsNanotechnologyComposite materialComputer scienceGeologyPathologyLayer (electronics)MedicineAlternative medicineOceanographyComputer graphics (images)Advanced MEMS and NEMS TechnologiesPhotonic and Optical DevicesAdvanced Measurement and Metrology Techniques