Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC
Shuoshuo Qu, Chengxiang Wei, Yuying Yang, Peng Yao, Dongkai Chu, Yadong Gong, Zhao Dong, Xianpeng Zhang
Topics & Concepts
GrindingMonocrystalline siliconMaterials scienceSurface roughnessBrittlenessComposite materialSurface (topology)Mechanism (biology)Crystal (programming language)Surface finishProcess (computing)MetallurgyGeometryComputer scienceSiliconEpistemologyOperating systemMathematicsProgramming languagePhilosophyAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsAdvanced machining processes and optimization