Improvement of titanium film uniformity by magnetron sputtering with electromagnetic coil design
Qiaoru An, Taoran Jiang, Haisheng Fang
Topics & Concepts
Materials scienceSputter depositionTitaniumCavity magnetronElectromagnetic coilSputteringHigh-power impulse magnetron sputteringComposite materialOptoelectronicsOpticsThin filmMetallurgyElectrical engineeringNanotechnologyEngineeringPhysicsMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsWelding Techniques and Residual Stresses