Review of Laser Doping and its Applications in Silicon Solar Cells
Michelle Vaqueiro‐Contreras, Brett Hallam, Catherine Chan
Abstract
Laser-doped selective emitter diffusion techniques have become mainstream in solar cell manufacture covering 60% of the market share in 2022 and are expected to continue to grow to above 90% within the next five years (ITRPV). This was a very rapid uptake of technology, coming from only ∼10% penetration in 2018, and has enabled over 20 fA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> front recombination current reductions on the dominant passivated emitter and rear cell concepts in the same short period. In this article, a broad overview of key concepts in relation to laser doping methods relevant to solar cell manufacturing is given. We first discuss the basic mechanisms behind laser doping along with the benefits over conventional doping methods. The main laser doping approaches reported in the literature are then discussed, along with implications for metallization strategy, particularly in relation to selective emitter and back surface field formation in the dominant passivated emitter and rear cell technology. Different cell concepts that have benefited from the application of laser doping are also discussed. In the last section, we discuss the main defects induced by laser processing of silicon which affect the finished devices, potential and debated causes, as well as some commonly applied treatments for their mitigation.