Detecting abnormal behavior of automatic test equipment using autoencoder with event log data
Young-Mok Bae, Young-Gwan Kim, Jeong-Woo Seo, Hyun‐A Kim, Chang-Ho Shin, Jeonghwan Son, Gyuho Lee, Kwang-Jae Kim, Gyuho Lee, Kwang-Jae Kim
Topics & Concepts
Event (particle physics)Reliability engineeringAutoencoderEngineeringWaferTest dataData miningComputer scienceReal-time computingArtificial intelligenceElectrical engineeringArtificial neural networkQuantum mechanicsPhysicsSoftware engineeringAnomaly Detection Techniques and ApplicationsFault Detection and Control SystemsIndustrial Vision Systems and Defect Detection