Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process
Jun-Chao Ren, Ding Liu, Yin Wan
Topics & Concepts
Iterative learning controlControl theory (sociology)Model predictive controlObserver (physics)LinearizationCompensation (psychology)State observerComputer scienceAdaptive controlProcess (computing)Iterative methodIterative and incremental developmentControl engineeringTracking errorAlgorithmEngineeringControl (management)Nonlinear systemArtificial intelligenceQuantum mechanicsPsychologyPhysicsPsychoanalysisOperating systemSoftware engineeringIterative Learning Control SystemsAdvanced Control Systems Optimization