A mini review on contamination control in ultrapure liquids for semiconductor manufacturing – From the perspective of liquid-solid interfaces
Yingnan Shen, Liang Hu, Wentao Chai, Junhao Miao, Hongjun Ye, Jinjia Xu, Rui Su, Xin Fu
Topics & Concepts
Contamination controlUltrapure waterContaminationPerspective (graphical)SemiconductorMaterials scienceProcess engineeringEnvironmental scienceComputer scienceNanotechnologyOptoelectronicsEngineeringArtificial intelligenceBiologyEcologyGas Sensing Nanomaterials and SensorsSurface Modification and SuperhydrophobicityNanomaterials and Printing Technologies