Effect of texture on 4H–SiC substrate surface on film growth: A molecular dynamics study
Lianghao Xue, Gan Feng, Gai Wu, Bing Gao, Rui Li, Sheng Liu
Topics & Concepts
Materials scienceSubstrate (aquarium)Groove (engineering)Texture (cosmology)Surface finishDislocationSurface energySurface roughnessComposite materialCrystallographyMetallurgyChemistryComputer scienceArtificial intelligenceGeologyImage (mathematics)OceanographySilicon Carbide Semiconductor TechnologiesZnO doping and propertiesCopper Interconnects and Reliability