Litcius/Paper detail

Effect of texture on 4H–SiC substrate surface on film growth: A molecular dynamics study

Lianghao Xue, Gan Feng, Gai Wu, Bing Gao, Rui Li, Sheng Liu

2023Vacuum13 citationsDOI

Topics & Concepts

Materials scienceSubstrate (aquarium)Groove (engineering)Texture (cosmology)Surface finishDislocationSurface energySurface roughnessComposite materialCrystallographyMetallurgyChemistryComputer scienceArtificial intelligenceGeologyImage (mathematics)OceanographySilicon Carbide Semiconductor TechnologiesZnO doping and propertiesCopper Interconnects and Reliability
Effect of texture on 4H–SiC substrate surface on film growth: A molecular dynamics study | Litcius