Molecular bixbyite-like In<sub>12</sub>-oxo clusters with tunable functionalization sites for lithography patterning applications
Xiaofeng Yi, Di Wang, Fan Li, Jian Zhang, Lei Zhang
Abstract
-oxo cluster starts the research on indium-based patterning materials and provides a new platform for future lithography radiation mechanism studies.
Topics & Concepts
BixbyiteSurface modificationNanotechnologyLithographyMaterials scienceChemistryOptoelectronicsPhysical chemistryIndiumElectronic and Structural Properties of OxidesMachine Learning in Materials ScienceNanocluster Synthesis and Applications